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A bionic approach for the mechanical and electrical decoupling of an MEMS capacitive sensor in ultralow

《机械工程前沿（英文）》 2023年第18卷第2期 doi: 10.1007/s11465-023-0747-1

摘要： Capacitive sensors are efficient tools for biophysical force measurement, which is essential for the exploration of cellular behavior. However, attention has been rarely given on the influences of external mechanical and internal electrical interferences on capacitive sensors. In this work, a bionic swallow structure design norm was developed for mechanical decoupling, and the influences of structural parameters on mechanical behavior were fully analyzed and optimized. A bionic feather comb distribution strategy and a portable readout circuit were proposed for eliminating electrostatic interferences. Electrostatic instability was evaluated, and electrostatic decoupling performance was verified on the basis of a novel measurement method utilizing four complementary comb arrays and application-specific integrated circuit readouts. An electrostatic pulling experiment showed that the bionic swallow structure hardly moved by 0.770 nm, and the measurement error was less than 0.009% for the area-variant sensor and 1.118% for the gap-variant sensor, which can be easily compensated in readouts. The proposed sensor also exhibited high resistance against electrostatic rotation, and the resulting measurement error dropped below 0.751%. The rotation interferences were less than 0.330 nm and (1.829 × 10⁻⁷)°, which were 35 times smaller than those of the traditional differential one. Based on the proposed bionic decoupling method, the fabricated sensor exhibited overwhelming capacitive sensitivity values of 7.078 and 1.473 pF/µm for gap-variant and area-variant devices, respectively, which were the highest among the current devices. High immunity to mechanical disturbances was maintained simultaneously, i.e., less than 0.369% and 0.058% of the sensor outputs for the gap-variant and area-variant devices, respectively, indicating its great performance improvements over existing devices and feasibility in ultralow biomedical force measurement.

关键词： micro-electro-mechanical system capacitive sensor bionics operation instability mechanical and electrical decoupling biomedical force measurement

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利用微机电系统技术制作弯曲结构表面无线无源柔性加速度计 Research Article

李晨1,2,贾蔓谷1,洪应平2,薛亚楠2,熊继军2

《信息与电子工程前沿（英文）》 2022年第23卷第5期页码 801-809 doi: 10.1631/FITEE.2100236

摘要：提出一种LC无线无源柔性加速度计，解决测量弯曲结构表面加速度的困难。该加速度计由柔性聚酰亚胺（PI）衬底和平面螺旋电感（厚度为300 nm）组成，采用微机电系统（MEMS）技术，可任意弯曲或折叠，可牢固地粘附在具有弯曲结构的物体表面。利用射频无线传输原理，通过改变加速度计与天线之间的距离来测量加速度信号。与带导线的加速度计相比，该加速度计可以防止导线在振动过程中脱落，从而延长其使用寿命。通过搭建实验平台，当天线与加速度计之间的距离为5 mm时，在弯曲结构表面展示了加速度计在20至100 m/s2加速度下的传感能力。结果表明，加速度和峰峰值输出电压接近线性，加速度计灵敏度高达0.27 mV/(m•s−2)。此外，该加速度计的最大误差小于0.037%。

关键词：弯曲结构表面；柔性加速度计；微机电系统（MEMS）技术；无线非接触式测量

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Micro-spectrophotometer based on micro electro-mechanical systems technology

ZHOU Lianqun, LI Zhenggang, WU Yihui, ZHANG Ping, XUAN Ming, JIA Hongguang

《机械工程前沿（英文）》 2008年第3卷第1期页码 37-43 doi: 10.1007/s11465-008-0001-x

摘要： A new mini-spectrophotometer is developed by adopting micro-silicon-slit and micro-silicon-fixer, which are based on micro electro-mechanical systems (MEMS) technology. Both the micro-silicon-slit and the micro-silicon-fixer have their own features, such as small volume and high precision, which are laid out and analyzed later. Meantime, through the analysis of the sample cell’s optical characteristics that have some impacts on the linearity of the spectrophotometer, a relationship equation, which is about the impact of the refractive index of the sample cell and the tested medium on the variety of the transmitted light intensity and the absorbency, is put forward. When the water and the air are taken as the referenced medium, the experiments demonstrate that the difference of the refractive index of the references does not influence the correlation coefficient and the slope of the absorbency-concentration curve. The final results show that the new mini-spectrophotometer with micro-silicon-slit and micro-silicon-fixer is worked out, its correlation coefficient > 0.999, and its refractive index resolving power is better than 0.01.

关键词： mini-spectrophotometer referenced micro-silicon-fixer electro-mechanical correlation coefficient

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Dependence of error sensitivity of frequency on bias voltage in force-balanced micro accelerometer

Lili CHEN, Wu ZHOU

《机械工程前沿（英文）》 2013年第8卷第2期页码 146-149 doi: 10.1007/s11465-013-0260-z

摘要：

To predict more precisely the frequency of force-balanced micro accelerometer with different bias voltages, the effects of bias voltages on error sensitivity of frequency is studied. The resonance frequency of accelerometer under closed loop control is derived according to its operation principle, and its error sensitivity is derived and analyzed under over etching structure according to the characteristics of Deep Reaction Ion Etching (DRIE). Based on the theoretical results, micro accelerometer is fabricated and tested to study the influences of AC bias voltage and DC bias voltage on sensitivity, respectively. Experimental results indicate that the relative errors between test data and theory data are less than 7%, and the fluctuating value of error sensitivity under the range of voltage adjustment is less than 0.01 μm . It is concluded that the error sensitivity with designed parameters of structure, circuit and process error can be used to predict the frequency of accelerometer with no need to consider the influence of bias voltage.

关键词： Micro-Electro-Mechanical Systems (MEMS) micro accelerometer force-balanced micro accelerometer frequency error sensitivity

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影响微电子机械系统成品率和可靠性和粘合力和磨擦力

王渭源

《中国工程科学》 2000年第2卷第3期页码 36-41

摘要：

文章评述了影响微电子机械系统（MEMS)成品率和可靠性的粘合力和摩擦力问题。在用氢氟酸(HF)腐蚀牺牲层、释放多晶Si微结构、干燥时，由于Si片表面薄层水的表面张力使两片亲水、间隙在微米量级的a片粘合起来，称为“释放有关粘合”。粘合也发生在封装后器件中，当输入信号过冲时，由于Si片表面的化学状态将Si片粘合起来，称为“使用中粘合”。解决粘合的最好办法是：在MEMS微结构的表面涂以抗粘合薄膜，将成品器件在干燥气氛下封装。介绍了抗粘合薄膜的制备工艺和目前存在的问题。相比之下，具有高速运动的MEMS,其摩擦力问题更为复杂。应用抗粘合薄膜，解决了粘合，也降低了摩擦力，但摩擦依然存在。摩擦带来磨损，降低器件可靠性和寿命。寻找既抗粘合、又耐磨的薄膜，是解决高速运动MEMS可靠性和寿命的一个关键。

关键词：微电子机械系统粘合力摩擦力抗粘合薄膜耐磨损薄膜

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Flexible micro flow sensor for micro aerial vehicles

Rong ZHU, Ruiyi QUE, Peng LIU

《机械工程前沿（英文）》 2017年第12卷第4期页码 539-545 doi: 10.1007/s11465-017-0427-0

摘要：

This article summarizes our studies on micro flow sensors fabricated on a flexible polyimide circuit board by a low-cost hybrid process of thin-film deposition and circuit printing. The micro flow sensor has merits of flexibility, structural simplicity, easy integrability with circuits, and good sensing performance. The sensor, which adheres to an object surface, can detect the surface flow around the object. In our study, we install the fabricated micro flow sensors on micro aerial vehicles (MAVs) to detect the surface flow variation around the aircraft wing and deduce the aerodynamic parameters of the MAVs in flight. Wind tunnel experiments using the sensors integrated with the MAVs are also conducted.

关键词： micro flow sensor flexible sensor surface flow sensing aerodynamic parameter micro aerial vehicle (MAV)

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Effect of Joule heating on electro-osmotic flow in a closed-end micro-channel with isothermal and convective

Liang ZHAO, Linhua LIU,

《能源前沿（英文）》 2009年第3卷第4期页码 381-388 doi: 10.1007/s11708-009-0057-2

摘要： The effect of Joule heating on the steady state electro-osmotic flow in a closed-end micro-channel is studied through numerical simulation with the finite volume method. The velocity field and the temperature field are described by a rigorous mathematical model. Thermophysical properties including viscosity and thermal conductivity are considered to be temperature-dependent. The simulations show that the presence of Joule heating causes an increase in temperature and a decrease in viscosity in the whole micro-channel, which, thereafter, induce a large velocity near the wall and an increase in fluid velocity at the central region in order to maintain a zero flow rate at the cross section of the micro-channel. The effect of Joule heating on the induced pressure gradient is also studied, which is very important for the application of the closed-end micro-channel as a micro-actuator. The results reveal that the induced pressure gradient, taking into consideration Joule heating, is significantly smaller than that without considering Joule heating when the wall temperature of the micro-channel is constant. The induced pressure gradient difference between considering Joule heating and without considering Joule heating is small under the convective boundary condition.

关键词： closed-end micro-channel electrical double layer electro-osmotic flow induced pressure gradient Joule heating

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Optimal Timing and Recycling Operation Mode for Electro-Mechanical Products Active Remanufacturing

Wang Gao,Tao Li,Shi-tong Peng,Liang Wang,Hong-chao Zhang

《工程管理前沿（英文）》 2016年第3卷第2期页码 115-122 doi: 10.15302/J-FEM-2016019

摘要： The uncertainties of remanufactured products in multi-life cycle service, such as injury and restoration process route, are comprehensively analyzed in the present study from perspectives of cost and the environment. Based on life cycle assessment method and the life cycle cost analysis, the optimal timing model of active remanufacturing for electro-mechanical products is established considering these uncertainties. In addition, regarding the active remanufacturing as its guidance, this study explores the economic efficiency and corresponding operation mode of electro-mechanical products when recycling in the optimal timing. To validate the optimal timing model for electro-mechanical products active remanufacturing, a specific type of product is taken as a case study with mathematical statistics method and Monte Carlo simulation.

关键词： electro-mechanical products active remanufacturing optimal timing reverse logistics recycling mode

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Recent advances in micro- and nano-machining technologies

Shang GAO, Han HUANG

《机械工程前沿（英文）》 2017年第12卷第1期页码 18-32 doi: 10.1007/s11465-017-0410-9

摘要：

Device miniaturization is an emerging advanced technology in the 21st century. The miniaturization of devices in different fields requires production of micro- and nano-scale components. The features of these components range from the sub-micron to a few hundred microns with high tolerance to many engineering materials. These fields mainly include optics, electronics, medicine, bio-technology, communications, and avionics. This paper reviewed the recent advances in micro- and nano-machining technologies, including micro-cutting, micro-electrical-discharge machining, laser micro-machining, and focused ion beam machining. The four machining technologies were also compared in terms of machining efficiency, workpiece materials being machined, minimum feature size, maximum aspect ratio, and surface finish.

关键词： micro machining cutting electro discharge machining (EDM) laser machining focused ion beam (FIB)

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Effects of environmental media on the transmission of an inductive link in wireless microsystems

Lei DONG, Li-Feng WANG, Qing-An HUANG

《机械工程前沿（英文）》 2017年第12卷第4期页码 554-556 doi: 10.1007/s11465-017-0450-1

摘要：

An inductive link between two magnetically coupled coils in wireless microsystems is modeled by considering an additional parasitic capacitive link to describe the effect of environmental media. With a system of inductor-capacitor passive wireless sensors, the effects of environmental media are studied theoretically and experimentally for the first time. Results suggest that the capacitive link is non-negligible when the distance between the two coupled coils is comparable with the coupling area, particularly when the environmental medium has a large dielectric constant.

关键词： capacitive link monitoring correction passive wireless sensor

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Experimental study on mechanical properties of a novel micro-steel fiber reinforced magnesium phosphate

《结构与土木工程前沿（英文）》 2021年第15卷第4期页码 1047-1057 doi: 10.1007/s11709-021-0755-3

摘要： Magnesium phosphate cement (MPC) received increased attention in recent years, but MPC-based concrete is rarely reported. The micro-steel fibers (MSF) were added to MPC-based concrete to enhance its ductility due to the high brittleness in tensile and flexural strength properties of MPC. This paper investigates the effect of MSF volume fraction on the mechanical properties of a new pattern of MPC-based concrete. The temperature development curve, fluidity, cubic compressive strength, modulus of elastic, axial compressive strength, and four-point flexural strength were experimentally studied with 192 specimens, and a scanning electron microscopy (SEM) test was carried out after the specimens were failed. Based on the test results, the correlations between the cubic compressive strength and curing age, the axial and cubic compressive strength of MPC-based concrete were proposed. The results showed that with the increase of MSF volume fraction, the fluidity of fresh MPC-based concrete decreased gradually. MSF had no apparent influence on the compressive strength, while it enhanced the four-point flexural strength of MPC-based concrete. The four-point flexural strength of specimens with MSF volume fraction from 0.25% to 0.75% were 12.3%, 21.1%, 24.6% higher than that of the specimens without MSF, respectively.

关键词： magnesium phosphate cement-based concrete micro-steel fibers four-point flexural strength compressive strength

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用于微电子机械系统封装的体硅键合技术和薄膜密封技术

王渭源,王跃林

《中国工程科学》 2002年第4卷第6期页码 56-62

摘要：

对静电键合、体硅直接键合和界面层辅助键合等三种体硅键合技术，整片操作、局部操作和选择保护等三种密封技术，以及这些技术用于微电子机械系统的密封作了评述，强调在器件研究开始时应考虑封装问题，具体技术则应在保证器件功能和尽量减少芯片复杂性两者之间权衡决定。

关键词：体硅键合技术薄膜密封技术微电子机械系统封装技术

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油气田监测高性能微传感器及数字化系统

赵玉龙,牛喆,周冠武,赵立波,蒋庄德

《中国工程科学》 2013年第15卷第1期页码 99-105

摘要：

针对油气田特殊环境要求，介绍了一种高温高压传感器芯片的设计及加工制造方法，并研发了相关的高性能数字变送系统。所设计的高温高压传感器芯片解决了传统压阻式传感器在高温高压环境下的热稳定性问题，通过数字补偿技术进一步提升了其系统的线性度与精度，并针对油气田监测环境扩展了其相关外围设备。同时，为了适应油气田管监测理要求，设计了相关无线传感网络，以确保其工业生产的高效运行和有效控制。通过具体实验测试数据，验证了该油气田监测高性能微传感器及数字化系统的高精度及高可靠性，该系统的精度达到0.2 % FS及以上，达到世界先进水平，对国内的石化工业发展有着非常重要的意义。

关键词：高温高压传感器芯片高性能数字变送系统数字补偿技术无线传感网络高精度

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Strengthening of polysulfone membranes using hybrid mixtures of micro- and nano-scale modifiers

Peyman P. Selakjani, Majid Peyravi, Mohsen Jahanshahi, Hamzeh Hoseinpour, Ali S. Rad, Soodabeh Khalili

《化学科学与工程前沿（英文）》 2018年第12卷第1期页码 174-183 doi: 10.1007/s11705-017-1670-y

摘要： Polysulfone (PSf) membranes were modified by either a new organic modifier (sulfonated poly(ether sulfide sulfone), SPESS) or a traditional modifier (rice hulk). These membranes were further reinforced with either multi-walled carbon nanotubes (MWCNTs) or silica nanoparticles. Having a dye rejection of 98.46%, the reinforced membranes increased more than 50% in strength but no change in solution flux was observed. The morphological and roughness studies were conducted using scanning electron microscopy and atomic force microscopy. Moreover, the PSF membranes were also characterized by differential scanning calorimetry. Modifying the membranes with organic modifier or nanofiller increases the glass transition temperature ( ). The highest and strength were observed for the PSf-SPESS-MWCNT membrane. SPESS decreases surface roughness but MWCNT increases roughness on the nanoscale. All membranes show a bimodal pore size distribution, whereas the PSf-SPESS-MWCNT membrane exhibits a relatively uniform distribution of macroscopic and microscopic pores.

关键词： polysulfone membrane mechanical properties micro- and nano-modification binary and ternary system dye removal

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变面积结构微机械电容式加速度传感器

李宝清,陆德仁,王渭源

《中国工程科学》 2000年第2卷第2期页码 36-40

摘要：

文章首次报道了一种基于面积可变电容结构的微机械加速度传感器。质量块呈栅状结构，由悬臂梁支撑。两组交叉放置的定电极位于质量块的正下方。在惯性力的作用下，质量块呈平行于衬底水平移动，引起由质量块的栅与定电极的叉指构成的差分电容变化。通过测量差分电容的变化，可以得到加速信号的大小。理论分析表明加速度响应信号随面积呈线性变化，而与质量块及定电极的间距无关。加速度传感器的制作采用了基于金属电镀的准LIGA技术，设计量程为20m/s²。测量结果表明，加速度传感器量程为20m/s²，灵敏度为58.1mV/(m·s^-2)，非线性为4%FS。讨论了器件线性度不够理想的原因。

关键词：电容加速度传感器变面积